MEMS-Based Tactile Sensors: Materials, Processes and Applications in Robotics

Area of Science:

• Robotics
• Sensor Technology
• Microelectromechanical Systems (MEMS)

Background:

• Robotic manipulation faces challenges in contact force control and approach motion.
• Microelectromechanical Systems (MEMS) offer advanced sensing solutions for robots.

Purpose of the Study:

• To review MEMS-based tactile, force, and pressure sensors for robotic applications.
• To analyze the integration of MEMS sensors for dexterous manipulation and human-like sensations.

Main Methods:

• Analysis of various MEMS sensing mechanisms (capacitive, resistive, piezoresistive, triboelectric).
• Integration of MEMS sensors with flexible materials and textiles for advanced robotics.
• Review of off-the-shelf MEMS sensors, including barometric sensors.

Main Results:

• MEMS sensors enable robots to detect contact forces, slippage, and object distances effectively.
• Integrated MEMS sensors are lightweight, space-efficient, and can simulate human finger sensations (gripping, hardness, stiffness).
• MEMS technology facilitates the development of flexible and snake robots.

Conclusions:

• MEMS sensors are crucial for improving robotic hand dexterity and object manipulation.
• The integration of MEMS offers new capabilities for health, security, safety, and environmental protection through advanced robotics.