Resistive Switching Memory Cell Property Improvement by Al/SrZrTiO3/Al/SrZrTiO3/ITO with Embedded Al Layer

Ke-Jing Lee1,2, Wei-Shao Lin1, Li-Wen Wang1

  • 1Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University, Tainan 701, Taiwan.

Summary

Aluminum-embedded strontium zirconate titanate (SZT) thin films significantly improve resistive random-access memory (RRAM) performance, offering higher resistance ratios and lower operating voltages for advanced memory devices.