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Dual-comb ranging method for simultaneously measuring the refractive index and surface spacing in a multi-lens

Chen Lin, Siyu Zhou, Ruixue Zhang

    Optics Express
    |December 23, 2022
    PubMed
    Summary

    This study introduces a dual-comb ranging method for simultaneously measuring refractive index and surface spacing in multi-lens systems. This innovation enables highly accurate, real-time measurements crucial for ultra-precision optics like lithography objectives.

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    Area of Science:

    • Optical Metrology
    • Precision Engineering
    • Interferometry

    Background:

    • Accurate refractive index and surface spacing are critical for ultra-precision optical systems, including lithography objectives.
    • Conventional methods require known refractive indices for thickness measurements, leading to inaccuracies and inconvenience.

    Purpose of the Study:

    • To develop a method for simultaneous measurement of refractive index and surface spacing in multi-lens systems.
    • To overcome limitations of conventional measurement techniques in optical metrology.

    Main Methods:

    • Utilized a dual-comb ranging method for non-contact, simultaneous measurement.
    • Applied the technique to multi-lens systems, focusing on lithography objectives.

    Main Results:

    • Achieved thickness measurement precision better than 0.18 µm.
    • Obtained refractive index measurement precision better than 1.6 × 10-4.

    Conclusions:

    • The proposed dual-comb ranging method offers a fast, real-time, and precise solution for measuring multi-lens systems.
    • This technique is vital for enhancing the fabrication and assembly of components in advanced optical instruments.