In-Operando Optical Spectroscopy of Field-Effect-Gated Al-Doped ZnO.
Maria Sygletou1, Stefania Benedetti2, Alessandro di Bona2
1OPTMATLAB, Dipartimento di Fisica, Università di Genova, Via Dodecaneso 33, 16146Genova, Italy.
ACS Applied Materials & Interfaces
|January 5, 2023
Summary
Transparent conductive oxides (TCOs) like aluminum-doped zinc oxide (AZO) can have their optical and electrical properties actively tuned by applied voltage. This research demonstrates electrical control over TCO dielectric properties for photonic applications.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Photonics
Background:
- Transparent conductive oxides (TCOs) possess a unique combination of optical transparency and electrical conductivity.
- Their optical response is highly sensitive to doping levels, making them suitable for photonic applications.
- Aluminum-doped zinc oxide (AZO) is a TCO based on abundant elements.
Purpose of the Study:
- To investigate the active electrical manipulation of dielectric properties in aluminum-doped zinc oxide (AZO).
- To tune the optical and electrical performance of AZO films using an applied voltage.
- To understand the effect of charge injection and depletion on TCO behavior.
Main Methods:
- Fabrication of AZO films on SrTiO3 dielectric in a parallel-plate capacitor configuration.
- Applied voltage to electrically tune dielectric properties.
- In-operando spectroscopic ellipsometry to monitor changes in optical response.
- Optical response calculations to determine dielectric function variations and charge profiles.
Main Results:
- Successfully demonstrated active electrical tuning of optical and electric properties of AZO films.
- Observed significant sensitivity of the optical response to applied voltage, indicating modulation of dielectric properties.
- Extracted spatially resolved dielectric function variations and inferred charge injection/depletion profiles.
Conclusions:
- The study confirms the feasibility of electrical control over TCO dielectric properties.
- This electrical modulation of AZO offers a pathway for tunable photonic devices.
- The findings provide insights into charge dynamics at the TCO-dielectric interface.
Keywords:
Al-doped zinc oxideDebye lengthactive photonicsspectroscopic ellipsometrytransparent conductive oxides

