Noise-robust deep learning ghost imaging using a non-overlapping pattern for defect position mapping

Defect detection requires highly sensitive and robust inspection methods. This study shows that non-overlapping illumination patterns can improve the noise robustness of deep learning ghost imaging (DLGI) without modifying the convolutional neural network (CNN). Ghost imaging (GI) can be accelerated by combining GI and deep learning. However, the robustness of DLGI decreases in exchange for higher speed. Using non-overlapping patterns can decrease the noise effects in the input data to the CNN. This study evaluates the DLGI robustness by using non-overlapping patterns generated based on binary notation. The results show that non-overlapping patterns improve the position accuracy by up to 51%, enabling the detection of defect positions with higher accuracy in noisy environments.