Fiber-sensor alignment based on surface microstructures

Conventional methods have relied on specialized imaging equipment and advanced fabrication process to solve the problem of accurately aligning a microsensor to an optical fiber which is critical for its detection efficiency. To dramatically lower the barrier to high-precision alignment, we present a technique much easier to implement and much lower in cost. By fabricating replicable alignment and proximity structures on the surface of the sensor chip, we can achieve accurate alignment and position the fiber tip very close to the sensor without damaging it. We introduce an easy setup to examine the alignment result and demonstrate accurate alignment of dummy sensors as small as 5μm×5μm. We use our alignment method to realize efficient input coupling for a superconducting transition-edge sensor as an example of fruitful adoption in many possible applications.