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    We developed a low-cost, easy-to-implement method for precisely aligning microsensors to optical fibers using surface structures. This technique simplifies high-precision alignment for enhanced sensor detection efficiency.

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    Area of Science:

    • Microfabrication and Sensor Technology
    • Optical Engineering
    • Nanotechnology

    Background:

    • Accurate alignment of microsensors to optical fibers is crucial for efficient detection but conventionally requires complex equipment and processes.
    • Existing methods pose a high barrier to implementation due to cost and technical demands.

    Purpose of the Study:

    • To present a simplified, cost-effective technique for high-precision microsensor-to-optical fiber alignment.
    • To reduce the complexity and cost associated with achieving optimal sensor detection efficiency.

    Main Methods:

    • Fabrication of replicable alignment and proximity structures directly onto the sensor chip surface.
    • Development of a straightforward setup for verifying alignment accuracy.
    • Demonstration of alignment with microscale dummy sensors (as small as 5μm×5μm).

    Main Results:

    • Successful implementation of a low-cost, high-precision alignment technique.
    • Demonstrated accurate alignment of microscale sensors using the novel surface structures.
    • Verified the method's efficacy through alignment of dummy sensors measuring 5μm×5μm.

    Conclusions:

    • The developed method significantly lowers the barrier to high-precision microsensor-optical fiber alignment.
    • This technique enables efficient input coupling, exemplified by its application to superconducting transition-edge sensors.
    • The approach holds promise for diverse applications requiring precise micro-optical integration.