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Updated: Aug 15, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Lizhong Xu1, Jipeng Wang2, Chuanjun Zhao2
1Mechanical Engineering School, Yanshan University, Qinhuangdao, 066004, China. xlz@ysu.edu.cn.
This study introduces a novel double feedback circuit method for pulsed electrochemical micromachining. This technique enhances machining accuracy to the nanometer level, even with standard equipment.
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