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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Lucie Rapp1,2,3
1Maintain Aging Research Team, Centre for Epidemiology and Population Health Research, Université de Toulouse, Inserm, Université Paul Sabatier, Toulouse, France.
No abstract available in PubMed .