Stepped electrode designs of TSM langasite resonators for high-temperature applications

In this paper, we report the simulation and fabrication of thickness-shear mode langasite resonators with stepped elliptical electrode designs to investigate their effects on energy trapping and suppression of spurious modes at elevated temperatures. Finite element analysis was conducted to analyze the design of a stepped elliptical electrode on a contoured langasite crystal. Based on the simulation findings, langasite resonators with stepped electrodes were fabricated, and their displacement profiles and frequency-temperature properties were characterized using network analysis and laser Doppler vibrometry. Results demonstrate improved frequency separation between the resonant and spurious modes, and enhanced spurious mode suppression at both room and higher temperatures, suggesting that stepped elliptical electrode designs can effectively enhance the sensing performance of langasite resonators.