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    This summary is machine-generated.

    This study presents a novel technique to measure the phase and intensity of light diffraction orders using a liquid-crystal spatial light modulator (LC-SLM) and interferometry. The method offers a simple and advantageous approach for optical metrology.

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    Area of Science:

    • Optics and Photonics
    • Interferometry
    • Diffraction Gratings

    Background:

    • Quantitative evaluation of diffraction orders is crucial in optical metrology.
    • Liquid-crystal spatial light modulators (LC-SLMs) are versatile tools for manipulating light.
    • Phase-shifting interferometry is a powerful technique for phase retrieval.

    Purpose of the Study:

    • To develop and demonstrate a technique for quantitatively evaluating the intensity and phase of diffraction orders.
    • To adapt an LC-SLM setup for polarization common-path interferometry.
    • To validate the technique using tailored phase gratings and phase-shifting algorithms.

    Main Methods:

    • Utilizing an LC-SLM to display tailored phase gratings and a lens for Fourier transform.
    • Converting the setup into a polarization common-path interferometer by rotating a polarizer.
    • Applying a phase-shifting interferometry algorithm for phase retrieval of diffraction orders.
    • Calibrating the system's quadratic phase using triplicator gratings.

    Main Results:

    • Successful quantitative evaluation of intensity and phase of diffraction orders.
    • Demonstration of a simple and effective polarization common-path interferometer setup.
    • Experimental validation of tailored phase gratings with controlled phase shifts.

    Conclusions:

    • The presented technique provides an advantageous and simple method for phase and intensity evaluation of diffraction orders.
    • The developed LC-SLM-based interferometer is suitable for various optical metrology applications.
    • Tailored phase gratings offer precise control over diffraction orders.