Three-Dimensional Nanolithography with Visible Continuous Wave Laser through Triplet Up-Conversion

Zhijun Luo1,2, Duan Wang1,2, Kai Li1,2

  • 1Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, Hubei430074, People's Republic of China.

Summary

This study introduces a new direct laser writing method using triplet up-conversion for cost-effective, high-precision nanostructure fabrication. This technique achieves fine 50 nm line widths with low laser intensity, overcoming limitations of traditional two-photon polymerization.