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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

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Miniature Deformable MEMS Mirrors for Ultrafast Optical Focusing.

Afshin Kashani Ilkhechi¹, Matthew Martell¹, Roger Zemp¹

¹Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB T6G 1H9, Canada.

|January 21, 2023

Summary

This summary is machine-generated.

We developed fast-tuning micro-electro-mechanical systems (MEMS) mirrors that electrostatically actuate to change curvature at MHz rates. These MEMS mirrors offer optical focusing speeds orders of magnitude faster than existing technologies.

Keywords:

CMUT MEMS fabrication micro-mirrors

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Area of Science:

Optics and Photonics
Micro-electro-mechanical Systems (MEMS)

Background:

Traditional optical focusing technologies have limitations in tuning speed.
Rapid manipulation of light wavefronts is crucial for advanced optical systems.

Purpose of the Study:

To introduce and characterize novel ultrafast tunable MEMS mirrors.
To demonstrate their capability for high-speed optical focusing and wavefront tuning.

Main Methods:

Fabrication of miniature circular mirrored membranes with electrostatic actuation.
Theoretical modeling and simulations to predict focal shifts based on device parameters.
Experimental characterization of tuning rates and response times.

Main Results:

Achieved unprecedented tuning rates of approximately MHz, significantly faster than current technologies.
Demonstrated focal position shifts of ~1 mm at rates up to 4.9 MHz.
Observed response times below 5 μs with silicon membranes (30-100 μm radius) and 350 nm gap spacing.

Conclusions:

The developed MEMS mirrors enable ultrafast tuning of laser beam focal wavefronts.
These devices represent a significant advancement for high-speed optical focusing applications.
Potential applications include dynamic beam steering, adaptive optics, and optical metrology.