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Miniature Deformable MEMS Mirrors for Ultrafast Optical Focusing
Afshin Kashani Ilkhechi1, Matthew Martell1, Roger Zemp1
1Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB T6G 1H9, Canada.
Micromachines
|January 21, 2023
Summary
We developed fast-tuning micro-electro-mechanical systems (MEMS) mirrors that electrostatically actuate to change curvature at MHz rates. These MEMS mirrors offer optical focusing speeds orders of magnitude faster than existing technologies.
Area of Science:
- Optics and Photonics
- Micro-electro-mechanical Systems (MEMS)
Background:
- Traditional optical focusing technologies have limitations in tuning speed.
- Rapid manipulation of light wavefronts is crucial for advanced optical systems.
Purpose of the Study:
- To introduce and characterize novel ultrafast tunable MEMS mirrors.
- To demonstrate their capability for high-speed optical focusing and wavefront tuning.
Main Methods:
- Fabrication of miniature circular mirrored membranes with electrostatic actuation.
- Theoretical modeling and simulations to predict focal shifts based on device parameters.
- Experimental characterization of tuning rates and response times.
Main Results:
- Achieved unprecedented tuning rates of approximately MHz, significantly faster than current technologies.
- Demonstrated focal position shifts of ~1 mm at rates up to 4.9 MHz.
- Observed response times below 5 μs with silicon membranes (30-100 μm radius) and 350 nm gap spacing.
Conclusions:
- The developed MEMS mirrors enable ultrafast tuning of laser beam focal wavefronts.
- These devices represent a significant advancement for high-speed optical focusing applications.
- Potential applications include dynamic beam steering, adaptive optics, and optical metrology.
