Design, Simulation, and Fabrication of a New Three-Axis Inertial Switch with a Triangular Movable Electrode Structure

Wenguo Chen1, Rui Wang1, Huiying Wang1

  • 1Key Laboratory of Advanced Energy Materials Science and Technology, College of Information Engineering, Qujing Normal University, Qujing 655000, China.

Micromachines
|January 21, 2023
PubMed