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Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
Published on: June 18, 2020
Deng Yang1,2,3,4,5, Jiahao Zhao1,2,3,4,5
1Department of Precision Instrument, Tsinghua University, Beijing 100084, China.
Acoustic wake-up technologies enable ultra-low power microsystems for long-term monitoring. This review covers acoustic sensing, recognition, and system architectures, paving the way for widespread Internet of Things applications.
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