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Tunable MEMS-Based Terahertz Metamaterial for Pressure Sensing Application.

Wei-Hsi Lai1, Binghui Li1, Shih-Huai Fu1

  • 1School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou 510006, China.

Micromachines
|January 21, 2023
PubMed
Summary

A novel micro-electro-mechanical system (MEMS) tunable terahertz metamaterial (MTM) effectively senses pressure. Bending the metamaterial

Keywords:
flow rate sensormetamaterialpressure sensorsplit-ring resonatorterahertz

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Area of Science:

  • Terahertz (THz) technology
  • Metamaterials
  • Micro-electro-mechanical systems (MEMS)

Background:

  • Terahertz metamaterials offer unique electromagnetic properties.
  • Micro-electro-mechanical systems enable tunable device fabrication.

Purpose of the Study:

  • To propose and demonstrate a MEMS-based tunable metamaterial (MTM) for pressure sensing.
  • To investigate the electromagnetic response of the MTM under mechanical strain.

Main Methods:

  • Fabrication of a gold split-ring resonator (SRR) cantilever on a silicon substrate with through-silicon via (TSV).
  • Utilizing airflow to bend the SRR cantilever, altering its electromagnetic response.
  • Characterizing the MTM's resonance shift in transverse magnetic (TM) and transverse electric (TE) modes.

Main Results:

  • The MTM exhibited tunable electromagnetic responses dependent on SRR cantilever bending.
  • Resonance blue-shifts of 0.075 THz (TM mode) and 0.140 THz (TE mode) were observed.
  • Tuning was achieved by changing the SRR cantilever angle from 10° to 45°.

Conclusions:

  • The proposed MEMS-MTM demonstrates potential for pressure and flow rate sensing applications.
  • The study highlights the tunability and polarization dependence of the MTM.
  • This work opens possibilities for advanced THz sensing devices.