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Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical
Hiroaki Satoh1,2, Koki Isogai2, Shohei Iwata2
1Research Institute of Electronics, Shizuoka University, Hamamatsu 432-8011, Japan.
Sensors (Basel, Switzerland)
|January 21, 2023
Summary
This study introduces a novel optical biosensor using a silicon-on-insulator photodiode and surface plasmon antenna for sensitive refractive index detection. This technology enables high-throughput, label-free biomolecular interaction analysis on a single chip.
Area of Science:
- Photonics and Biosensing
- Integrated Optics
- Nanophotonics
Background:
- Optical biosensors are crucial for detecting biomolecular interactions.
- Surface Plasmon Resonance (SPR) sensors are established but can be complex.
- Silicon-on-Insulator (SOI) technology offers a platform for integrated photonic devices.
Purpose of the Study:
- To develop a novel optical biosensor combining SOI photodiodes with surface plasmon antennas.
- To demonstrate sensitive refractive index (RI) detection.
- To explore the potential for high-throughput, label-free biosensing.
Main Methods:
- Fabrication of a silicon-on-insulator (SOI) p-n junction photodiode integrated with a surface plasmon (SP) antenna.
- Utilizing phase-matching conditions between diffracted light and waveguide modes for sensitivity.
- Evaluating refractive index detection limit using bulk solutions.
- Employing finite-difference time-domain (FDTD) simulations to assess biomolecular interaction detection.
Main Results:
- Observed sharp peaks in spectroscopic light sensitivity when phase-matching conditions were met.
- Achieved a refractive index detection limit of 1.11 × 10-5 RIU.
- Simulations indicated potential for detecting intermolecular bonds and biomolecular interactions.
- Demonstrated feasibility of large-scale integration on a single chip using CMOS fabrication.
Conclusions:
- The proposed SOI photodiode with an SP antenna functions as a sensitive optical biosensor.
- The sensor performance is comparable to traditional SPR sensors.
- This technology provides a foundation for high-throughput, label-free biosensing applications.

