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Updated: Aug 13, 2025

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High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps

Yuichi Kurashima1, Taisei Motomura2, Shinya Yanagimachi3

  • 1Device Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Ibaraki 305-8564, Japan.

Sensors (Basel, Switzerland)
|January 21, 2023
PubMed

Keywords:
anodic bondinglaser cooling atomminiature ion pumpultra-high vacuum

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