You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: Aug 13, 2025

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Ji-Hwan Moon1, Baul Kim1, Minho Choi1
1Department of Physics and KI for the NanoCentury, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.
Researchers developed a maskless, etching-free method using focused ion beam (FIB) irradiation to create sub-micrometer micro-light-emitting diode (µLED) pixel arrays. This technique enables high-density displays by inducing optical quenching and electrical isolation without damaging the surface.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: