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PLD plasma plume analysis: a summary of the PSI contribution

Christof W Schneider1, Thomas Lippert1,2

  • 1Laboratory for Multiscale Materials Experiments, Paul Scherrer Institute, 5232 Villigen PSI, Switzerland.

Applied Physics. A, Materials Science & Processing
|January 26, 2023
PubMed

Keywords:
Kinetic energy distributionMass spectrometryPlasma spectroscopyPulsed laser depositionThin films

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