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High-resolution micro-cavity filling sensing by fiber optic interferometry.

Majid Fazeli Jadidi1, Zahra Gholamvand1, Graham L W Cross1

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A new fiber-based sensor monitors micro- and nano-scale cavity filling in injection molding. This technology ensures quality assurance for micro-optical components, improving manufacturing efficiency.

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Area of Science:

  • Micro- and nano-engineering
  • Polymer processing
  • Optical metrology

Background:

  • Micro- and nano-products have growing applications in telecommunications, medical diagnostics, and optoelectronics.
  • Injection molding is increasingly used for serial manufacturing of micro- and nano-scale optical components.
  • Quality assurance for cavity filling is critical but underdeveloped in micro-fabrication.

Purpose of the Study:

  • To introduce a fiber-based interferometric sensor for monitoring micro- and nano-scale cavity filling.
  • To provide a method for quality assurance in micro-optical component manufacturing.
  • To enable real-time monitoring of polymer melt front motion during micro-molding.

Main Methods:

  • Development of a fiber-based interferometric sensor.
  • Integration of the sensor into a macroscopic molding die for optical microstructures.
  • Monitoring melt front motion and cavity filling using the interferometer.
  • Verification of sensor results using atomic force microscopy.

Main Results:

  • The sensor successfully resolved melt front motion into microcavities.
  • Complete filling of microcavities was detected and verified.
  • The system demonstrated capability in monitoring polymer movement despite low reflectivity and unoptimized optics.
  • The sensor provides a solution for monitoring nanometer-scale filling processes.

Conclusions:

  • The fiber-based interferometric sensor offers a simple and flexible solution for monitoring micro- and nano-scale cavity filling.
  • This technology can be integrated into injection molds, embossing, and nanoimprint tooling.
  • It addresses the challenge of quality assurance in micro-fabrication by enabling local filling process monitoring.