Finite Element Analysis Model of Electronic Skin Based on Surface Acoustic Wave Sensor

In recent years, with the rapid development of flexible electronic devices, researchers have a great interest in the research of electronic skin (e-skin). Traditional e-skin, which is made of rigid integrated circuit chips, not only limits the overall flexibility, but also consumes a lot of power and poses certain security risks to the human body. In this paper, a wireless passive e-skin is designed based on the surface acoustic wave sensor (SAWS) of lithium niobate piezoelectric film. The e-skin has the advantages of small size, high precision, low power consumption, and good flexibility. With the multi-sensing function of stress, temperature, and sweat ion concentration, etc., the newly designed e-skin is a sensor platform for a wide range of external stimuli, and the measurement results can be directly presented in frequency. In order to explore the characteristic parameters and various application scenarios of the SAWS, finite element analysis is carried out using the simulation software; the relationship between the SAWS and various influencing factors is explored, and the related performance curve is obtained. These simulation results provide important reference and experimental guidance for the design and preparation of SAW e-skin.