Resolution adjustable Lissajous scanning with piezoelectric MEMS mirrors

Area of Science:

• Microelectromechanical Systems (MEMS)
• Optical Engineering
• Laser Scanning Technology

Background:

• A dual-axis piezoelectric MEMS mirror with a low crosstalk gimbal structure was previously designed.
• This device is crucial for advanced laser beam scanning applications.

Purpose of the Study:

• Investigate Lissajous scanning resolution of the MEMS mirror.
• Analyze the impact of frequency ratio and phase modulation on scanning performance.
• Redefine and experimentally verify the center angular resolution for Lissajous scanning.

Main Methods:

• Theoretical calculation and experimental measurement to redefine center angular resolution.
• Careful study of MEMS mirror scanning nonlinearity.
• Operation of the MEMS mirror in a pseudo-resonance state.

Main Results:

• Achieved a center angular resolution better than 0.16°(H) × 0.03°(V).
• Demonstrated a scanning Field of View (FoV) of 35.0°(H) × 16.5°(V).
• Identified Lissajous scanning nonlinearity characteristics.

Conclusions:

• A feasible route for resolution-adjustable Lissajous scanning was provided.
• Optimization of frequency ratio and phase modulation is key for enhanced scanning.
• The findings support high-definition and high-frame-rate (HDHF) laser scanning imaging.