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Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
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Liquid Precursor-Guided Phase Engineering of Single-Crystal VO2 Beams.
Run Shi1, Yonghuang Wu1, Zeqin Xin1
1State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China.
Angewandte Chemie (International Ed. in English)
|February 22, 2023
Summary
Precise phase engineering of Vanadium Dioxide (VO2) is now achievable. A liquid precursor method controls stoichiometry, enabling selective stabilization of various VO2 phases for advanced applications.
Area of Science:
- Materials Science
- Solid-State Chemistry
- Nanotechnology
Background:
- Vanadium Dioxide (VO2) exhibits competing phases sensitive to stoichiometry.
- Precise control over VO2 phase engineering remains a challenge due to vague stoichiometry manipulation mechanisms.
Purpose of the Study:
- To systematically study stoichiometry manipulation of single-crystal VO2 beams using liquid-assisted growth.
- To develop a method for precise phase engineering of VO2.
Main Methods:
- Liquid-assisted growth of single-crystal VO2 beams.
- Utilizing a liquid V2O5 precursor to control oxygen exposure and stoichiometry.
- Varying the thickness of the liquid V2O5 precursor to tune VO2 phase stability.
Main Results:
- Abnormal synthesis of oxygen-rich VO2 phases under reduced oxygen concentration was observed.
- The liquid V2O5 precursor stabilizes the stoichiometric M1 phase by shielding VO2 crystals.
- Selective stabilization of various VO2 phases (M1, T, M2) was achieved by controlling precursor thickness and exposure time.
- Spatially managed multiphase structures were created in single VO2 beams.
Conclusions:
- Liquid precursor-guided growth offers a novel approach for precise VO2 phase engineering.
- This method allows for the selective stabilization of different VO2 phases and the creation of multiphase structures.
- The controlled manipulation of VO2 phases enhances deformation modes for actuation applications.

