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Integrated Glass Microfluidics with Electrochemical Nanogap Electrodes
Sahana Sarkar1, Ab F Nieuwenhuis1, Serge G Lemay1
1Faculty of Science and Technology and MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.
Analytical Chemistry
|February 22, 2023
Summary
We developed a new method for making chip-based electrochemical nanogap sensors with microfluidics. This approach uses SU-8 bonding for better flow control and enables scalable, reproducible sensor production.
Area of Science:
- Electrochemistry
- Microfluidics
- Nanotechnology
- Sensor Fabrication
Background:
- Microfluidic devices are crucial for lab-on-a-chip applications.
- Traditional polydimethylsiloxane (PDMS) microfluidics present challenges in integration and scalability.
- Electrochemical nanogap sensors offer high sensitivity for various analyses.
Purpose of the Study:
- To present a novel framework for fabricating chip-based electrochemical nanogap sensors integrated with microfluidics.
- To overcome limitations of PDMS-based microfluidics in sensor integration.
- To enable wafer-scale production of these advanced sensors.
Main Methods:
- Utilized SU-8 aided adhesive bonding of silicon and glass wafers for microfluidic integration.
- Developed a fabrication process for monolithic sensor structures.
- Implemented parallel flow control without using polydimethylsiloxane (PDMS).
Main Results:
- Achieved wafer-scale production with high throughput and reproducibility.
- Demonstrated simple electrical and fluidic connections, reducing the need for specialized equipment.
- Successfully performed redox cycling measurements under laminar flow conditions using the fabricated sensors.
Conclusions:
- The presented framework offers a scalable and reproducible method for fabricating integrated microfluidic electrochemical nanogap sensors.
- The SU-8 bonding technique simplifies sensor construction and integration.
- These sensors show promise for advanced electrochemical analyses in microfluidic systems.
