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Comparison of CoW/SiO2 and CoB/SiO2 Interconnects from the Perspective of Electrical and Reliability Characteristics

Yi-Lung Cheng1, Kai-Hsieh Wang1, Chih-Yen Lee1

  • 1Department of Electrical Engineering, National Chi Nan University, Puli, Nantou 54561, Taiwan.

Materials (Basel, Switzerland)
|February 25, 2023
PubMed

Keywords:
barriercobalt (Co)cobalt-boron (CoB)cobalt-tungsten (CoW)electrical resistivityreliabilitytime-dependent-dielectric-breakdown

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