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Design and Optimization of Tool-Embedded Thin-Film Strain Sensor Substrate Structure.

Zhenyu He1, Wenge Wu1, Yunping Cheng1

  • 1School of Mechanical Engineering, North University of China, Taiyuan 030051, China.

Micromachines
|February 25, 2023
PubMed
Summary

This study optimizes substrate structures for thin-film strain sensors used in cutting force measurement. Enhanced designs significantly improve sensor sensitivity and comprehensive performance, leading to better tool monitoring.

Keywords:
connection areadesign criteriafunction areasubstrate structure design

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Area of Science:

  • Mechanical Engineering
  • Materials Science
  • Sensor Technology

Background:

  • Tool-embedded thin-film strain sensors are crucial for intelligent tool cutting force measurement models.
  • Substrate structure design is key to sensor performance, divided into function and connection areas.
  • Existing designs lack comprehensive optimization for sensitivity and durability.

Purpose of the Study:

  • To investigate and optimize the substrate structure of tool-embedded thin-film strain sensors.
  • To establish a substrate structure library for function and connection areas.
  • To develop an evaluation method for comprehensive sensor performance.

Main Methods:

  • Developed a substrate structure library with six function area layouts and five connection area layouts.
  • Applied statics and dynamics theories to establish functional relationships between structural parameters and sensor deflection/natural frequency.
  • Coupled static and dynamic design theories for comprehensive performance evaluation.

Main Results:

  • Optimized function area designs improved structural sensitivity by 1.75 times and comprehensive performance by 1.53 times.
  • Optimized connection area designs enhanced sensitivity by 2.3 times and comprehensive performance by 1.72 times.
  • Established functional relationships and an evaluation method for substrate structure parameters.

Conclusions:

  • The design and optimization process for substrate structures were summarized.
  • Five key design criteria for substrate structures were proposed.
  • Optimized substrate structures significantly enhance thin-film strain sensor performance for cutting force measurement.