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Preparation of Highly Stable Polymer Microstructure with Enhanced Adhesion Strength by Pushpin-like
Yongjin Wu1,2, Guifu Ding1, Yuan Zhu1,2
1National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China.
Polymers
|February 28, 2023
Summary
A novel pushpin-like nano/microstructure array significantly enhances polymer microstructure adhesion. This transition strengthening layer boosts interfacial adhesion strength, enabling more stable and versatile micro-electro-mechanical system devices.
Area of Science:
- Materials Science
- Nanotechnology
- Microfabrication
Background:
- Poor interfacial bonding between polymers and substrates (e.g., Silicon, metal) limits the application of polymer microstructures in micro-electro-mechanical system (MEMS) devices.
- Enhancing adhesion strength is crucial for developing intelligent and multifunctional MEMS devices.
Purpose of the Study:
- To propose and evaluate a transition strengthening layer using a pushpin-like nano/microstructure array to improve interfacial adhesion.
- To demonstrate the effectiveness of this approach for polymer microstructures, specifically using SU-8 photoresist.
Main Methods:
- A pushpin-like nano/microstructure array was fabricated using micromachining technology.
- Epoxy negative photoresist SU-8 was used to create microstructures on activated substrates with the array.
- Adhesion strength was quantified using a thrust tester, comparing standard and strengthened interfaces.
Main Results:
- Adhesion strength of SU-8 microstructures increased from 6.51 MPa to 15.42 MPa after applying the pushpin-like array.
- The method successfully fabricated various microstructures (hollow square, periodic, slender strip) and large-area structures with enhanced stability.
- Drifting and gluing phenomena, common in traditional designs, were avoided.
Conclusions:
- The pushpin-like nano/microstructure array acts as an effective transition strengthening layer, significantly improving polymer-substrate adhesion.
- This microfabrication technique offers enhanced stability, repeatability, and universality for polymer microstructures.
- The approach holds promise for advancing the development of stable and multifunctional MEMS devices.
