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2D absolute position measurement based on the hybrid encoding method.

Huining Zhao1, Ruru Niu1, Mengyao Fan1

  • 1School of Instrument Science and Opto-electronic Engineering, Hefei University of Technology, Hefei 230009, China.

The Review of Scientific Instruments
|March 1, 2023
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Summary
This summary is machine-generated.

This study presents a novel hybrid encoding method for precise two-dimensional (2D) absolute position measurement. The system achieves sub-micrometer accuracy, advancing micro-displacement table positioning.

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Area of Science:

  • Metrology and Measurement Science
  • Optical Engineering
  • Precision Engineering

Background:

  • Accurate absolute position measurement is critical for advanced manufacturing and scientific instrumentation.
  • Existing methods for two-dimensional (2D) micro-displacement tables face challenges in precision and efficiency.
  • Hybrid encoding principles offer potential for enhanced position determination.

Purpose of the Study:

  • To introduce a new hybrid encoding method for precise 2D absolute position measurement.
  • To design and develop a 2D encoding disk for this purpose.
  • To validate the system's performance through experimental measurements.

Main Methods:

  • Utilizing pseudo-random sequences and binary codes for long-distance position encoding.
  • Combining encoding sequences with checkerboards to create a hybrid 2D encoding scheme.
  • Designing a modular 2D encoding disk for X and Y position detection and image correction.
  • Implementing a measurement system with a 2D encoding disk, CCD camera, and telecentric lens.

Main Results:

  • The developed hybrid encoding method enables precise 2D absolute position measurement.
  • The designed 2D encoding disk facilitates efficient position detection and rapid image correction.
  • Experimental validation demonstrated an average position deviation of less than ±1 µm.

Conclusions:

  • The proposed hybrid encoding method and 2D encoding disk are effective for high-precision 2D absolute position measurement.
  • The system achieves sub-micrometer accuracy, suitable for demanding micro-displacement applications.
  • This technique offers a viable solution for accurate planar position determination in various scientific and industrial fields.