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Uncooled two-microbolometer stack for long wavelength infrared detection.

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Area of Science:

  • Optoelectronics
  • Infrared Detection Technology
  • Materials Science

Background:

  • Uncooled infrared detectors are crucial for thermal imaging and temperature sensing.
  • Achieving high absorption across multiple spectral bands in a single detector is challenging.
  • Metasurfaces offer novel ways to control light-matter interactions for enhanced optical performance.

Purpose of the Study:

  • To develop and characterize an uncooled infrared detector with a dual-layer microbolometer architecture.
  • To investigate the use of amorphous silicon germanium oxide and metasurfaces for improved infrared absorption.
  • To enable absolute temperature measurements by utilizing distinct spectral windows.

Main Methods:

  • Fabrication of a dual-layer microbolometer stack.
  • Integration of a metasurface for selective absorption in the bottom layer.
  • Utilizing a Fabry-Perot cavity for absorption in the top layer.
  • Characterization of spectral responsivity, detectivity, and thermal response time.

Main Results:

  • Achieved high spectral responsivity (>10^5 V/W) and detectivity (>10^8 cm Hz^1/2/W).
  • Demonstrated a fast thermal response time of 1.13 ms.
  • Reduced microbolometer voltage noise power spectral density through vacuum annealing.
  • Successfully utilized two distinct spectral windows for infrared absorption.

Conclusions:

  • The dual-layer microbolometer architecture with metasurface and Fabry-Perot cavity effectively enhances IR absorption.
  • The developed detector shows promising performance for absolute temperature measurements in the LWIR region.
  • Vacuum annealing is an effective method for reducing noise and improving detector performance.