High-speed multiparametric imaging through off-resonance tapping AFM with active probe

Off-resonance tapping (ORT) mode of atomic force microscopy (AFM), based on force-distance curve, is widely concerned due to its advantages of weak tip-sample interaction and concurrent quantitative property mapping. However, the ORT-AFM still has the disadvantage of slow scan speed caused by low modulation frequency. In this paper, we overcome this disadvantage by introducing active probe method. With active probe, the cantilever was directly actuated with the induced strain after applying voltage in the piezoceramic film. In this way, the modulation frequency could be increased to more than an order of magnitude faster than that of traditional ORT, thus improving the scan rate. We demonstrated high-speed multiparametric imaging with the active probe method in ORT-AFM.