Doping Engineering for Optimizing Piezoelectric and Elastic Performance of AlN

Xi Yu1, Lei Zhu2, Xin Li3

  • 1School of Microelectronics, Shanghai University, Shanghai 201899, China.

Summary

Double-element doping of aluminum nitride (AlN) enhances piezoelectric properties for 5G RF filters without compromising elastic modulus. Researchers identified specific compounds like B0.125Er0.125Al0.75N with superior performance characteristics.

Related Concept Videos