Multitarget Reactive Magnetron Sputtering towards the Production of Strontium Molybdate Thin Films

Area of Science:

• Materials Science
• Surface Science
• Thin Film Deposition

Background:

• Strontium and molybdenum oxides are important materials with diverse applications.
• Controlling stoichiometry and oxidation states in oxide thin films is crucial for tuning their properties.

Purpose of the Study:

• To investigate the direct synthesis of strontium and molybdenum oxide thin films.
• To explore the influence of sputtering parameters on film composition and oxidation states.
• To characterize the resulting films using X-ray photoelectron spectroscopy.

Main Methods:

• Direct synthesis of thin films via multitarget reactive magnetron sputtering (MT-RMS).
• Co-sputtering of high-purity Sr and Mo targets in an argon-oxygen atmosphere.
• Controlled oxygen supply to sputtering targets.
• Analysis using X-ray photoelectron spectroscopy (XPS), including high-resolution spectra deconvolution.

Main Results:

• Successfully synthesized strontium and molybdenum oxide thin films.
• Demonstrated control over Mo atom concentration by adjusting Mo target power during MT-RMS.
• Confirmed that both Sr and Mo were in oxidized states, with no metallic peaks observed.
• Identified multiple Mo 3d peaks, indicating molybdenum bonds in lower valence states.
• Observed consistent Sr 3d spectra across samples, suggesting stable strontium oxidation.

Conclusions:

• MT-RMS is an effective method for synthesizing tunable strontium and molybdenum oxide thin films.
• Sputtering power is a key parameter for controlling film composition and oxidation states.
• The XPS analysis provides detailed insights into the chemical states of Mo and Sr in the synthesized films.