Effect of Femtosecond Laser Processing Parameters on the Ablation Microgrooves of RB-SiC Composites

Because of the high hardness, brittleness, and anisotropy of reaction-bonded silicon carbide composites (RB-SiC), it is challenging to process high-quality textures on their surfaces. With the advantages of high processing accuracy and low processing damage, femtosecond laser processing is the preferred technology for the precision processing of difficult-to-process materials. The present work used a femtosecond laser with a linear scanning path and a spot diameter of 18 µm to process microgrooves on RB-SiC. The influence of different processing parameters on the microgroove profile, dimensions, and ablation rate (AR) was investigated. The ablation width W_a and average ablation depth D_a of microgrooves were evaluated, and the various patterns of varying processing parameters were obtained. A model for W_a prediction was developed based on the laser fluence within the finite length (F_L). As a result, the experimental values were distributed near the prediction curve with a maximum error of 20.4%, showing an upward trend of gradually decreasing increments. For a single pass, the AR value was mainly determined by the laser energy, which could reach the scale of 10⁶ μm³/s when the laser energy was greater than 50 μJ. For multiple passes, the AR value decreased as the number of passes increased and it finally stabilized. The above research will provide theoretical and experimental support for the high-quality and efficient processing of RB-SiC surface textures.