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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Development of an Optoelectronic Integrated Sensor for a MEMS Mirror-Based Active Structured Light System.

Xiang Cheng1,2,3, Shun Xu1,2,3, Yan Liu4

  • 1School of Aerospace Engineering, Xiamen University, Xiamen 361005, China.

Micromachines
|March 29, 2023
PubMed
Summary
This summary is machine-generated.

This study introduces a novel optoelectronic sensor to correct phase errors in micro-electro-mechanical system (MEMS) scanning micromirrors. The sensor significantly improves the accuracy of active structured light systems by reducing phase errors to 2.5%.

Keywords:
MEMS mirrorhigh linearityoptoelectronic integrated sensor high irradiance responsivityphase error

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Area of Science:

  • Optoelectronics
  • Micro-electro-mechanical Systems (MEMS)

Background:

  • MEMS scanning micromirrors are crucial for active structured light systems.
  • Initial phase errors from micromirrors degrade system accuracy.

Purpose of the Study:

  • To develop an optoelectronic integrated sensor for correcting micromirror phase errors.
  • To enhance the accuracy of active structured light systems.

Main Methods:

  • Fabrication of an optoelectronic sensor chip using a 180 nm CMOS process.
  • Integration of a large-area photodetector (PD) with a receiving circuit (post amplifier, operational amplifier, bandgap reference, reference current circuit).

Main Results:

  • The sensor exhibits high irradiance responsivity (100 mV/(μW/cm²) at 5 V) and linearity.
  • Achieved a -3 dB bandwidth of 2 kHz and minimal detectable light power of 19.4 nW.
  • Effectively reduced micromirror phase error to 2.5%.

Conclusions:

  • The developed optoelectronic sensor is suitable for active structured light systems requiring high accuracy.
  • The sensor's performance metrics satisfy the demands of various applications.
  • This technology offers a viable solution for mitigating phase errors in MEMS-based systems.