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A Microwave Pressure Sensor Loaded with Complementary Split Ring Resonator for High-Temperature Applications.

Libo Yang1, Hairong Kou1, Xiaoli Wang2

  • 1Shanxi Provincial Key Laboratory of Intelligent Sensing and Multi-Dimensional Information Processing, Taiyuan University, Taiyuan 030032, China.

Micromachines
|March 29, 2023
PubMed
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This summary is machine-generated.

This study presents a novel substrate integrated waveguide sensor for high-temperature pressure detection. The complementary split ring resonator sensor demonstrates stable operation and temperature-compensated pressure measurements up to 500 °C.

Area of Science:

  • Microwave Engineering
  • Sensor Technology
  • Materials Science

Background:

  • High-temperature environments pose significant challenges for conventional pressure sensors.
  • Substrate Integrated Waveguide (SIW) technology offers potential for robust sensor design.
  • Complementary Split Ring Resonators (CSRRs) are effective electromagnetic structures for sensing applications.

Purpose of the Study:

  • To develop and validate a passive SIW sensor utilizing CSRR for accurate pressure detection in high-temperature conditions.
  • To investigate the sensor's performance and sensitivity across a wide temperature range (25-500 °C).
  • To propose a temperature compensation algorithm for reliable pressure signal acquisition.

Main Methods:

  • Sensor design and modeling using High Frequency Structure Simulator (HFSS) with parameter optimization.
Keywords:
CSRRHTCCharsh environmentpressure sensor

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  • Fabrication of the CSRR-based SIW sensor on a High Temperature Co-fired Ceramic (HTCC) substrate using 3D co-firing and screen-printing.
  • Experimental testing in a high-temperature pressure furnace (25-500 °C, 10-300 kPa).
  • Development and implementation of a temperature compensation algorithm.
  • Main Results:

    • The fabricated sensor operates stably in high-temperature (up to 500 °C) and high-pressure (up to 300 kPa) environments.
    • Pressure sensitivity was measured at 139.77 kHz/kPa at 25 °C, increasing to 191.97 kHz/kPa at 500 °C.
    • The proposed temperature compensation algorithm enables accurate pressure measurements despite temperature variations.

    Conclusions:

    • The CSRR-based SIW sensor is a viable solution for high-temperature pressure monitoring.
    • The sensor exhibits excellent stability and sensitivity in extreme conditions.
    • Effective temperature compensation is crucial for accurate pressure sensing in varying thermal environments.