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Published on: August 1, 2018
Off-Stoichiometry Thiol-Ene Polymers: Inclusion of Anchor Groups Using Allylsilanes
Kirill Puchnin1,2, Dmitriy Ryazantsev1,2, Egor Latipov2
1Scientific-Manufacturing Complex Technological Centre, Zelenograd 124498, Russia.
New OSTE-AS polymers bond directly to silicon wafers without adhesives, enhancing microelectronic and biomedical applications. This research optimized polymer properties for superior hardness, strength, and wafer adhesion.
Area of Science:
- Materials Science
- Polymer Chemistry
- Microfabrication
Background:
- Polymers are crucial for microelectronic and biomedical industries.
- Direct bonding of polymers to silicon wafers simplifies fabrication processes.
Purpose of the Study:
- Develop novel silane-containing polymers (OSTE-AS) for direct silicon wafer adhesion.
- Optimize polymer composition for enhanced mechanical and bonding properties.
- Investigate the characteristics of the optimized OSTE-AS polymer.
Main Methods:
- Off-stoichiometry thiol-ene polymerization incorporating allylsilanes.
- Optimization of polymer composition for hardness, tensile strength, and adhesion.
- Characterization of polymer properties including Young's modulus, wettability, dielectric constant, optical transparency, thermal stability (TGA/DSC), and chemical resistance.
- Fabrication of thin polymer layers on silicon wafers via spin-coating.
Main Results:
- Successfully synthesized and optimized OSTE-AS polymers with direct silicon wafer bonding capabilities.
- Achieved maximum hardness and tensile strength with good silicon wafer adhesion.
- Comprehensive characterization revealed favorable material properties for microelectronic applications.
- Demonstrated the feasibility of creating microfluidic systems using OSTE-AS polymers and silicon wafers.
Conclusions:
- OSTE-AS polymers offer a promising solution for adhesive-free silicon wafer bonding.
- The developed polymers exhibit excellent material properties suitable for advanced microelectronic and biomedical devices.
- This advancement facilitates the fabrication of integrated microfluidic systems.
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