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Updated: Aug 4, 2025

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
Published on: June 18, 2020
Yujie Ai1, Hongrui Lv2, Ye Wang3
1Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
This study demonstrates a low insertion loss (IL) Surface Acoustic Wave (SAW) filter on Gallium Nitride (GaN). Increasing interdigital transducers (N_IDT) significantly reduced IL, enhancing filter performance without external matching.
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