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Plasma Nitridation Effect on β-Ga2O3 Semiconductors

Sunjae Kim1,2, Minje Kim1,2, Jihyun Kim3

  • 1Department of Materials Science and Engineering, Korea Aerospace University, Goyang 10540, Republic of Korea.

Nanomaterials (Basel, Switzerland)
|April 13, 2023
PubMed

Keywords:
Ga2O3defect densitygallium oxideplasma nitridation

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