Enhanced CO Functionality on Carbon Papers Ensures Lowering Nucleation Delay of ALD for Ru towards Unprecedented

Sitaramanjaneya M Thalluri1,2, Jhonatan Rodriguez-Pereira1,2, Raul Zazpe1,2

  • 1Central European Institute of Technology, Brno University of Technology, Purkynova 123, 61200, Brno, Czech Republic.

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