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Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model

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Published on: May 23, 2018

Protocol for preparing layer-engineered van der Waals materials through atomic spalling.

Ji-Yun Moon¹, Seung-Il Kim¹, Mukkath Joseph Josline²

¹Department of Energy Systems Research, Ajou University, Suwon 16499, Korea; Department of Materials Science and Engineering, Ajou University, Suwon 16499, Korea.

|April 18, 2023

Summary

This summary is machine-generated.

This study introduces a novel atomic spalling protocol for creating layer-engineered van der Waals (vdW) materials. This method precisely controls the number of layers exfoliated from bulk crystals for advanced material applications.

Keywords:

Material Sciences Physics

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Area of Science:

Materials Science
Nanotechnology
Solid State Physics

Background:

Van der Waals (vdW) materials possess unique layered structures with tunable electronic and optical properties.
Precise control over the number of layers in vdW materials is crucial for optimizing their performance in various applications.
Existing exfoliation techniques often lack control over layer thickness or scalability.

Purpose of the Study:

To present a detailed protocol for preparing layer-engineered vdW materials.
To enable the controlled exfoliation of vdW materials with a specific number of layers from bulk crystals.
To establish a reliable method for producing high-quality, atomically thin vdW materials.

Main Methods:

A novel atomic spalling process is described, involving the preparation and fixing of bulk crystals.
Internal stress regulation of a stressor film is achieved through a specific deposition technique.
Layer-engineered atomic-scale spalling is performed, followed by the removal of polymer/stressor films.

Main Results:

The protocol successfully demonstrates the exfoliation of vdW materials with a controlled number of layers.
The atomic spalling technique allows for precise layer-by-layer removal from bulk crystals.
The developed method provides a pathway for reproducible synthesis of atomically thin vdW materials.

Conclusions:

The presented atomic spalling protocol offers a robust method for producing layer-engineered vdW materials.
This technique facilitates the controlled fabrication of atomically thin materials for advanced research and applications.
The protocol is a valuable contribution to the field of 2D material synthesis and characterization.