Reactive etching of gallium oxide on eutectic gallium indium (eGaIn) with chlorosilane vapor to induce differential

Kazi Zihan Hossain1, Momena Monwar1, M Rashed Khan1

  • 1Department of Chemical and Materials Engineering, University of Nevada, Reno, Reno, Nevada 89557, USA. mrkhan@unr.edu.

Soft Matter
|April 19, 2023
PubMed

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