Protocol for preparation of solid-state multipore osmotic power generators

Nanopore is an emerging energy-harvesting device that can create electricity directly from salt solutions. Here, we present a protocol for the preparation and structure optimization of solid-state multipore osmotic power generators. We describe steps for sculpting multiple pores at well-defined positions in a thin SiNx membrane using electron-beam lithography. We also detail an imprinting technique to form polydimethylsiloxane blocks with fluidic channels bonded to the multipore membrane. This approach facilitates repeated liquid-exchange processes involved in ionic current measurements. For complete details on the use and execution of this protocol, please refer to Tsutsui et al.¹.