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Graphene-Based ESD Protection for Future ICs.

Cheng Li1, Zijin Pan1, Weiquan Hao1

  • 1Department of Electrical and Computer Engineering, University of California, Riverside, CA 92521, USA.

Nanomaterials (Basel, Switzerland)
|April 28, 2023
PubMed
Summary

Graphene-based electrostatic discharge (ESD) protection offers a novel solution for integrated circuits (ICs). This approach utilizes graphene nanoelectromechanical systems (gNEMS) and interconnects to overcome limitations of traditional silicon-based ESD protection methods.

Keywords:
CDMESD protectionHBMTLPVFTLPgNEMSgrapheneinterconnectsswitch

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Area of Science:

  • Materials Science
  • Electrical Engineering
  • Semiconductor Device Physics

Background:

  • Integrated circuits (ICs) require on-chip electrostatic discharge (ESD) protection.
  • Conventional silicon PN junction-based ESD protection presents challenges like parasitic capacitance, leakage, noise, and large area consumption.
  • These limitations hinder the design-for-reliability of advanced ICs.

Purpose of the Study:

  • To review the development of disruptive graphene-based on-chip ESD protection.
  • To introduce novel graphene nanoelectromechanical system (gNEMS) ESD switches and graphene ESD interconnects.
  • To inspire new approaches for future on-chip ESD protection.

Main Methods:

  • Review of concept development for graphene-based ESD protection.
  • Discussion of simulation, design, and measurement of gNEMS ESD structures.
  • Analysis of graphene ESD protection interconnects.

Main Results:

  • Graphene-based ESD protection, including gNEMS switches and interconnects, is presented as a viable alternative.
  • Simulation, design, and measurement data for these graphene structures are discussed.
  • The potential for graphene to overcome limitations of traditional ESD protection is highlighted.

Conclusions:

  • Graphene-based on-chip ESD protection offers a disruptive solution to current design challenges.
  • The gNEMS ESD switch and graphene interconnects show promise for advanced ICs.
  • This review encourages innovative thinking for next-generation ESD protection strategies.