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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
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A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10,000
Wenli Liu1,2,3, Yujie Lu1,2,3, Zeji Chen1,4
1Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Sensors (Basel, Switzerland)
|April 28, 2023
Summary
This study introduces a novel silicon MEMS resonator operating above 1 GHz with a quality factor over 10,000. A unique tether design significantly reduces energy loss, enhancing performance for wireless communications.
Area of Science:
- Microelectromechanical Systems (MEMS)
- Solid-State Physics
- Electrical Engineering
Background:
- High-frequency resonators are crucial for wireless communication systems.
- Quality factor (Q) is a key performance metric, limited by energy loss mechanisms like anchor loss and phonon-phonon interaction dissipation (PPID).
- High-order width extensional mode (WEM) resonators offer high frequencies but suffer from large motional impedance.
Purpose of the Study:
- To design and fabricate a silicon-based WEM MEMS resonator with a high Q-factor (>10,000) at frequencies above 1 GHz.
- To analyze and mitigate energy loss mechanisms, specifically anchor loss and PPID.
- To improve resonator performance for potential applications in high-frequency wireless communication.
Main Methods:
- Numerical calculation and simulation to analyze energy loss mechanisms.
- Design and optimization of a novel combined tether to suppress anchor loss and reduce motional impedance.
- Batch fabrication of resonators using a silicon-on-insulator (SOI) process.
Main Results:
- Demonstration of a 4th WEM resonator with a resonance frequency of 1.1 GHz and a Q-factor of 10,920, yielding an f × Q product of 1.2 × 10^13.
- Experimental validation of the combined tether's effectiveness in reducing anchor loss and motional impedance.
- Motional impedance reduction of 33% and 20% in the 3rd and 4th modes, respectively, using the combined tether.
Conclusions:
- The developed silicon WEM MEMS resonator achieves high Q-factors and frequencies, suitable for advanced wireless systems.
- The novel combined tether design is effective in suppressing energy loss and improving resonator performance.
- This work presents a promising platform for next-generation high-frequency communication devices.
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