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Related Experiment Video

Updated: Jul 31, 2025

Author Spotlight: Enhancement of Salient Object Detection for Smart Grid Applications

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Published on: December 15, 2023

High-precision detection method for an object edge based on a position-sensitive detector.

Yusheng Zhai, Yiheng Zhao, Saisai Yan

|May 3, 2023

Summary

This study introduces a novel object edge detection method using a position-sensitive detector (PSD) in defect spot mode. The technique achieves high sensitivity and accuracy for precise measurements and alignment applications.

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Area of Science:

Optics and Photonics
Metrology
Instrumentation

Background:

Accurate object edge detection is crucial for high-precision industrial applications.
Traditional methods may face limitations in sensitivity and accuracy.
Position-sensitive detectors (PSDs) offer potential for advanced metrology.

Purpose of the Study:

To propose and verify an innovative object edge detection method.
To enhance edge-detection sensitivity and accuracy using a PSD.
To demonstrate the method's applicability in precision measurement and alignment.

Main Methods:

Utilized the defect spot working mode of a position-sensitive detector (PSD).
Leveraged the output characteristics of the PSD in defect spot mode.
Incorporated the size transformation properties of a focused beam.
Performed calibration experiments with a piezoelectric transducer (PZT).

Main Results:

Achieved object edge-detection sensitivity of 1 nm.
Demonstrated object edge-detection accuracy of 20 nm.
Verified the effectiveness of the proposed method through experiments.

Conclusions:

The proposed PSD-based method significantly improves edge-detection sensitivity and accuracy.
This technique is suitable for high-precision alignment and geometric parameter measurement.
The defect spot working mode of PSD offers a promising approach for advanced metrology.