Visible to near-infrared single pixel microspectrometer using electrothermal MEMS grating

Area of Science:

• Optical Engineering
• Spectroscopy
• Microelectromechanical Systems (MEMS)

Background:

• Compact spectrometers are crucial for non-destructive and point-of-care spectral analysis.
• Existing technologies often lack the necessary portability or resolution for diverse field applications.

Purpose of the Study:

• To report the development of a novel single-pixel microspectrometer (SPM).
• To demonstrate the SPM's capability for visible to near-infrared (VIS-NIR) spectroscopy.
• To explore its potential for mobile spectroscopic applications.

Main Methods:

• Designed and fabricated a single-pixel microspectrometer utilizing a MEMS diffraction grating.
• Integrated key optical components: slits, an electrothermally rotating diffraction grating, a spherical mirror, and a photodiode.
• Packaged the entire optical module within a compact volume of 1.7 cm³.

Main Results:

• Achieved a spectral response range from 405 nm to 810 nm.
• Obtained an average spectral resolution of 2.2 nm.
• Demonstrated the feasibility of a compact, high-performance microspectrometer.

Conclusions:

• The developed SPM offers a promising solution for portable spectral analysis.
• Its compact size and performance enable diverse mobile spectroscopic applications.
• Potential applications include healthcare monitoring, product screening, and non-destructive inspection.