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Updated: Jul 31, 2025

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments
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Aspheric surface measurement by absolute wavelength scanning interferometry with model-based retrace error

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    This study introduces a novel absolute interferometric method for rapid, full-area measurement of aspheric surfaces. The technique achieves high accuracy by virtually combining multiple laser wavelengths and compensating for errors numerically.

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    Area of Science:

    • Optical Metrology
    • Surface Metrology
    • Interferometry

    Background:

    • Accurate measurement of aspheric surfaces is critical in optics manufacturing.
    • Traditional interferometric methods often require mechanical movement or struggle with high fringe densities.
    • Non-nulling configurations can introduce retrace errors.

    Purpose of the Study:

    • To present a non-nulling absolute interferometric method for fast, full-area aspheric surface measurement.
    • To enable accurate metrology without mechanical scanning.
    • To overcome limitations of traditional interferometry in undersampled areas.

    Main Methods:

    • Utilizing multiple tunable, single-frequency laser diodes to achieve absolute interferometric measurement.
    • Virtually interconnecting three different wavelengths for pixel-wise geometrical path difference measurement.
    • Compensating for retrace errors using a calibrated numerical model (numerical twin).

    Main Results:

    • Achieved fast and full-area measurement of aspheric surfaces.
    • Enabled accurate measurement in undersampled areas of high fringe density interferograms.
    • Experimental verification demonstrated a measurement uncertainty of λ/20, agreeing with scanning interferometry.

    Conclusions:

    • The proposed non-nulling absolute interferometric method offers a viable alternative for aspheric surface metrology.
    • Numerical error compensation is effective in correcting for retrace errors in non-nulling setups.
    • This technique provides high accuracy and efficiency for optical component characterization.