Metasurfaces on silicon photonic waveguides for simultaneous emission phase and amplitude control

Chip-scale photonic systems that manipulate free-space emission have recently attracted attention for applications such as free-space optical communications and solid-state LiDAR. Silicon photonics, as a leading platform for chip-scale integration, needs to offer more versatile control of free-space emission. Here we integrate metasurfaces on silicon photonic waveguides to generate free-space emission with controlled phase and amplitude profiles. We demonstrate experimentally structured beams, including a focused Gaussian beam and a Hermite-Gaussian TEM₁₀ beam, as well as holographic image projections. Our approach is monolithic and CMOS-compatible. The simultaneous phase and amplitude control enable more faithful generation of structured beams and speckle-reduced projection of holographic images.